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About this Engineering article
The Piezoresistive Effect of SiC for MEMS Sensors at High Temperatures: A Review by Phan, Hoang-Phuong; Dao, Dzung Viet; Nakamura, Koichi; Dimitrijev, Sima; Nguyen, Nam-Trung is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Phan, Hoang-Phuong; Dao, Dzung Viet; Nakamura, Koichi; Dimitrijev, Sima; Nguyen, Nam-Trung
- Publisher
- IEEE; Institute of Electrical and Electronics Engineers; Institute of Electrical and Electronics Engineers (IEEE) (ISSN 1057-7157)
- Published
- 2015
- Field
- Engineering (Physical Sciences)