About this scholarly article

MHS'96 Proceedings of the Seventh International Symposium on Micro Machine and Human Science - A compact SR beamline for fabrication of high aspect ratio MEMS microparts by Sugiyama, S.; Zhang, Y.; Ueno, H.; Hosaka, M.; Fujimoto, T.; Maeda, R.; Tanaka, T. is a scholarly article available to read on EtoBox.

Author

Sugiyama, S.; Zhang, Y.; Ueno, H.; Hosaka, M.; Fujimoto, T.; Maeda, R.; Tanaka, T.

Publisher

IEEE

Published

1996