About this scholarly article

SPIE Proceedings [SPIE Optical Science and Technology, the SPIE 49th Annual Meeting - Denver, CO (Monday 2 August 2004)] Interferometry XII: Applications - Methods to recognize the sample position for most precise interferometric length measurements by Schoedel, Rene; Osten, Wolfgang; Novak, Erik; Decker, Jennifer E. is a scholarly article available to read on EtoBox.

Author

Schoedel, Rene; Osten, Wolfgang; Novak, Erik; Decker, Jennifer E.

Publisher

SPIE

Published

2004

Language

EN