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About this Engineering article
Surface-Imaged Silicon Polymers for 193-nm Excimer Laser Lithography by Kunz, Roderick R.; Horn, Mark W.; Wallraff, Greg M.; Bianconi, Patricia A.; Miller, Robert D.; Goodman, Russell W.; Smith, David A.; Eshelman, Jon R.; Ginsberg, Eric J. is a Engineering article available to read on EtoBox.
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- Author
- Kunz, Roderick R.; Horn, Mark W.; Wallraff, Greg M.; Bianconi, Patricia A.; Miller, Robert D.; Goodman, Russell W.; Smith, David A.; Eshelman, Jon R.; Ginsberg, Eric J.
- Publisher
- Institute of Pure and Applied Physics; Japan Society of Applied Physics; IOP Publishing (ISSN 0021-4922)
- Published
- 1992
- Field
- Engineering (Physical Sciences)