About this scholarly article

SPIE Proceedings [SPIE SPIE MOEMS-MEMS - San Francisco, California, USA (Saturday 2 February 2013)] MOEMS and Miniaturized Systems XII - Design and characterization of a hybrid-integrated MEMS scanning grating spectrometer by Grüger, Heinrich; Piyawattanametha, Wibool; Park, Yong-Hwa; Knobbe, Jens; Pügner, Tino; Schenk, Harald is a scholarly article available to read on EtoBox.

Author

Grüger, Heinrich; Piyawattanametha, Wibool; Park, Yong-Hwa; Knobbe, Jens; Pügner, Tino; Schenk, Harald

Publisher

SPIE

Published

2013