About this scholarly article

SPIE Proceedings [SPIE Advanced Laser Technologies: International Symposium - Prague, Czech Republic (Monday 8 November 1993)] Second International Symposium on Advanced Laser Technologies - Application of IR laser light scattering for nondestructive control of near-surface regions in semiconductor substrates by Kalinushkin, Victor P.; Murin, D. I.; Yuryev, Vladimir A.; Astafiev, Oleg V.; Buvaltsev, A I.; Pustovoy, Vladimir I.; Jelinek, Miroslav is a scholarly article available to read on EtoBox.

Author

Kalinushkin, Victor P.; Murin, D. I.; Yuryev, Vladimir A.; Astafiev, Oleg V.; Buvaltsev, A I.; Pustovoy, Vladimir I.; Jelinek, Miroslav

Publisher

SPIE

Published

1994

Language

EN