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About this Chemistry article
Electron Interactions With Plasma Processing Gases: An Update for CF4, CHF3, C2F6, and C3F8 by Christophorou, L. G.; Olthoff, J. K. is a Chemistry article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Chemistry.
- Author
- Christophorou, L. G.; Olthoff, J. K.
- Publisher
- American Institute of Physics; American Institute of Physics Inc.; AIP Publishing (ISSN 0047-2689)
- Published
- 1999
- Language
- EN
- Field
- Chemistry (Physical Sciences)