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This document discusses how electron scattering effects the shape of nanostructures created by focused electron beam induced deposition (FEBID). It presents three key findings: 1) Film deposition is monitored in situ by measuring the sample current, which increases as the film thickness approaches the electron penetration range as more electrons are absorbed. 2) A physical model is proposed for how electron scattering influences the growth of vertical tips with diameters smaller than the electron range,

Author

Atomic Industry

Language

EN