About this scholarly article

SPIE Proceedings [SPIE 2012 International Workshop on Information Data Storage and Ninth International Symposium on Optical Storage - Shanghai, China (Sunday 21 October 2012)] 2012 International Workshop on Information Storage and Ninth International Symposium on Optical Storage - XPS study on the selective wet etching mechanism of GeSbTe phase change thin films with tetramethylammonium hydroxide by Deng, Changmeng; Geng, Yongyou; Wu, Yiqun; Gan, Fuxi; Song, Zhitang is a scholarly article available to read on EtoBox.

Author

Deng, Changmeng; Geng, Yongyou; Wu, Yiqun; Gan, Fuxi; Song, Zhitang

Publisher

SPIE

Published

2013

Language

EN