Opening book details…
Can I read The Science and Engineering of Microelectronic Fabrication on EtoBox?
The Science and Engineering of Microelectronic Fabrication by Stephen A. Campbell; Professor in the Department of Electrical and Computer Engineering Stephen A Campbell is a science book available to read on EtoBox.
What is The Science and Engineering of Microelectronic Fabrication about?
Ideal for upper-level undergraduate or first-year graduate courses and as a handy reference for professionals, The Science and Engineering of Microelectronic Fabrication, Second Edition, provides a thorough and accessible introduction to the field of microfabrication. Revised and expanded in this second edition, the text covers all the basic unit processes used to fabricate integrated circuits, including photolithography, plasma and reactive ion etching, ion implantation, diffusion, oxidation, e
Who reads The Science and Engineering of Microelectronic Fabrication?
It is typically read by self-directed learners exploring a subject in depth.
Common subject areas: history, science, philosophy, social sciences.
- Author
- Stephen A. Campbell; Professor in the Department of Electrical and Computer Engineering Stephen A Campbell
- Publisher
- Oxford University Press, USA
- Published
- 2001
- Language
- EN
- ISBN
- 9780195136050
- Category
- science
- Subjects
- Engineering, Fiction, Semiconductors
- Rating
- 3.86 / 5 (13 ratings)
- Updated
- 2026-03-13
Other editions & translations
More by Stephen A. Campbell; Professor in the Department of Electrical and Computer Engineering Stephen A Campbell
Similar books
- Fabrication Engineering at the Micro and Nanoscale (The ^AOxford Series in Electrical and Computer Engineering) — Campbell, Stephen A., 1954-; Campbell, Stephen A., 1954- Science and engineering of microelectronic fabrication (2007)
- Introduction to Microelectronic Fabrication — Richard C. Jaeger (2002)
- Microelectronic Circuits (The Oxford Series in Electrical and Computer Engineering) — Adel S. Sedra, Kenneth Carless Smith, Tony Chan Carusone, Vincent Gaudet (2020)
- Electron-Beam Technology in Microelectronic Fabrication — George Brewer (1980)
- Composite Materials: Science and Engineering (Materials Research and Engineering) — Krishan Kumar Chawla (2013)
- Plasma Electronics: Applications in Microelectronic Device Fabrication (Series in Plasma Physics) — Makabe, Toshiaki; Petrović, Z (2006)
