Opening book details…
About this Engineering article
Silicon incorporation into chemical vapor deposition diamond: A role of oxygen by Sakaguchi, Isao; Nishitani-Gamo, Mikka; Loh, Kian Ping; Haneda, Hajime; Hishita, Shunichi; Ando, Toshihiro is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Sakaguchi, Isao; Nishitani-Gamo, Mikka; Loh, Kian Ping; Haneda, Hajime; Hishita, Shunichi; Ando, Toshihiro
- Publisher
- American Institute of Physics; AIP Publishing (ISSN 0003-6951)
- Published
- 1997
- Language
- EN
- Field
- Engineering (Physical Sciences)