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About this Engineering article
A study of thick 3C-SiC epitaxial layers grown on 6H-SiC substrates by sublimation epitaxy in vacuum by A. A. Lebedev; V. V. Zelenin; P. L. Abramov; E. V. Bogdanova; S. P. Lebedev; D. K. Nel’son; B. S. Razbirin; M. P. Shcheglov; A. S. Tregubova; M. Suvajarvi; R. Yakimova is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- A. A. Lebedev; V. V. Zelenin; P. L. Abramov; E. V. Bogdanova; S. P. Lebedev; D. K. Nel’son; B. S. Razbirin; M. P. Shcheglov; A. S. Tregubova; M. Suvajarvi; R. Yakimova
- Publisher
- Springer; Pleiades Publishing; Pleiades Publishing Ltd (ISSN 1063-7826)
- Published
- 2007
- Field
- Engineering (Physical Sciences)