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About this Engineering article
Optical Sensing Directional Acoustic Transducer with Grating Diaphragm Using Complementary Metal Oxide Semiconductor Compatible Micromachining Techniques by K. Suzuki; H. Funaki; Y. Naruse is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- K. Suzuki; H. Funaki; Y. Naruse
- Publisher
- Institute of Pure and Applied Physics; Japan Society of Applied Physics; IOP Publishing (ISSN 0021-4922)
- Published
- 2005
- Language
- EN
- Field
- Engineering (Physical Sciences)