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Investigation of Device Performance and Negative Bias Temperature Instability of Plasma Nitrided Oxide in Nanoscale p-Channel Metal–Oxide–Semiconductor Field-Effect Transistor's by Han, In-Shik; Ji, Hee-Hwan; Goo, Tae-Gyu; Yoo, Ook-Sang; Choi, Won-Ho; Na, Min-Ki; Kim, Yong-Goo; Park, Sung-Hyung; Lee, Heui-Seung; Kang, Young-Seok; Kim, Dae-Byung; Lee, Hi-Deok is a Engineering article available to read on EtoBox.

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Author
Han, In-Shik; Ji, Hee-Hwan; Goo, Tae-Gyu; Yoo, Ook-Sang; Choi, Won-Ho; Na, Min-Ki; Kim, Yong-Goo; Park, Sung-Hyung; Lee, Heui-Seung; Kang, Young-Seok; Kim, Dae-Byung; Lee, Hi-Deok
Publisher
Institute of Pure and Applied Physics; Japan Society of Applied Physics; IOP Publishing (ISSN 0021-4922)
Published
2008
Language
EN
Field
Engineering (Physical Sciences)

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