About this scholarly article

SPIE Proceedings [SPIE Micromachining and Microfabrication - San Jose, CA (Saturday 24 January 2004)] MEMS/MOEMS Components and Their Applications - Accelerometer by means of a resonant microactuator by Drabe, Christian; Janson, Siegfried W.; Henning, Albert K.; Schenk, Harald; Roscher, Kai-Uwe; Kunze, Detlef; Lakner, Hubert is a scholarly article available to read on EtoBox.

Author

Drabe, Christian; Janson, Siegfried W.; Henning, Albert K.; Schenk, Harald; Roscher, Kai-Uwe; Kunze, Detlef; Lakner, Hubert

Publisher

SPIE

Published

2004

Language

EN