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Polymeric materials for microelectronic applications : science and technology : developed from a symposium sponsored by the Polymers for Microelectronics and Photonics Group of the Society of Polymer Science, Japan, and the Division of Polymeric Materials: Science and Engineering, Inc., of the American Chemical Society, at the Polymers for Microelectronics 1993 meeting, Kawasaki, Japan, November… by Ito, Hiroshi (editor);Tagawa, Seiichi (editor);Horie, Kazuyuki (editor) is a nonfiction available to read on EtoBox.

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Content: Photophysics, photochemistry, and photo-optical effects in polymer solids / Kazuyuki Horie -- Photochemistry of liquid-crystalline polymers / David Creed, Richard A. Cozad, Anselm C. Griffin, Charles E. Hoyle, Lixin Jin, Petharnan Subramanian, Sangya S. Varma, and Krishnan Venkataram -- Dissociative electron capture of polymers with bridging acid anhydrides : matrix isolation electron spin resonance study / Paul H. Kasai -- Luminescence study of ion-irradiated aromatic polymers / Y. Aoki, H. Namba, F. Hosoi, and S. Nagai -- New directions in the design of chemically amplified resists / E. Reichmanis, M.E. Galvin, K.E. Uhrich, P. Mirau, and S.A. Heffner -- Dual-tone and aqueous base developable negative resists based on acid-catalyzed dehydration / Hiroshi Ito and Yasunari Maekawa -- Importance of donor-acceptor reactions for the photogeneration of acid in chemically amplified resists / Nigel P. Hacker -- Acid generation in chemically amplified resist films / Takeo Watanabe, Yoshio Yamashita, Takahiro Kozawa, Yoichi Yoshida, and Seiichi Tagawa -- Radiation-induced reactions of onium salts in novolak / Takahiro Kozawa, M. Uesaka, Takeo Watanabe, Yoshio Yamashita, H. Shibata,

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Author

Ito, Hiroshi (editor);Tagawa, Seiichi (editor);Horie, Kazuyuki (editor)

Publisher

AMERICAN CHEMICAL SOCIETY,WASHINGTON,DC 1994

Published

1994

Language

EN

ISBN

9780841215009

Category

nonfiction

Subjects

Science, Technology, Chemistry