Opening book details…
About this Materials Science article
The modelling routes for the chemical vapour deposition process: application to Si1−xGex deposition by M. Pons; C. Bernard; H. Rouch; R. Madar is a Materials Science article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Materials Science.
- Author
- M. Pons; C. Bernard; H. Rouch; R. Madar
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0169-4332)
- Published
- 1995
- Field
- Materials Science (Physical Sciences)