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About this Engineering article
Photodefinable Metal Oxide Dielectrics II: Direct Fabrication of Patterned High-k Dielectrics for Low Cost RF Capacitive MEMS Switches by Romeo, Michael; Finger, Isaac; Jeyakumar, Augustin; Wang, Guoan; Papapolymerou, John; Henderson, Clifford L. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Romeo, Michael; Finger, Isaac; Jeyakumar, Augustin; Wang, Guoan; Papapolymerou, John; Henderson, Clifford L.
- Publisher
- Cambridge University Press; Cambridge University Press (Materials Research Society); Cambridge University Press (CUP) (ISSN 0272-9172)
- Published
- 2004
- Language
- EN
- Field
- Engineering (Physical Sciences)