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About this Engineering article
Preparation of SiO2Film by Photo-Induced Chemical Vapor Deposition Using a Deuterium Lamp and Its Annealing Effect by Toyoda, Yoshihiko; Inoue, Kohji; Okuyama, Masanori; Hamakawa, Yoshihiro is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Toyoda, Yoshihiko; Inoue, Kohji; Okuyama, Masanori; Hamakawa, Yoshihiro
- Publisher
- Institute of Pure and Applied Physics; Japan Society of Applied Physics; IOP Publishing (ISSN 0021-4922)
- Published
- 1987
- Field
- Engineering (Physical Sciences)