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About this Materials Science article
A novel method for fabricating sub-16 nm footprint T-gate nanoimprint molds by C. Peng; X. Liang; S. Y. Chou is a Materials Science article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Materials Science.
- Author
- C. Peng; X. Liang; S. Y. Chou
- Publisher
- Institute of Physics; IOP Publishing; Institute of Physics Publishing (ISSN 0957-4484)
- Published
- 2009
- Field
- Materials Science (Physical Sciences)