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About this Engineering article
Micromachining of Inorganic Materials Using Plasma Soft X‐rays by Tetsuya Makimura; Satoshi Uchida; Takashige Fujimori; Hiroyuki Niino; Kouichi Murakami is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Tetsuya Makimura; Satoshi Uchida; Takashige Fujimori; Hiroyuki Niino; Kouichi Murakami
- Publisher
- Wiley (John Wiley & Sons); Wiley-Blackwell; Wiley (ISSN 1942-9533)
- Published
- 2008
- Field
- Engineering (Physical Sciences)