About this document

5990-8175EN AppNote 7700s Trichlorosilane by RocketMan is a document available to read on EtoBox.

This application note details a method for trace elemental analysis of trichlorosilane (TCS) using Agilent ICP-MS to ensure the purity of photovoltaic silicon. The method demonstrated effective measurement of metallic impurities, achieving low detection limits and validating the sample preparation process through spike recovery tests. This capability allows manufacturers to assess the quality of TCS before its use in producing high-purity polysilicon for solar cells.

Author

RocketMan

Language

EN