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Design and Experiments for Tunable Optical Sensor Fabrication Using (1 1 1)-Oriented Silicon Micromachining by Dana Cristea; M. Kusko; C. Tibeica; Raluca Muller; Elena Manea; D. Syvridis is a Engineering article available to read on EtoBox.

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The paper presents the design and the experiments performed for integration of a micromechanical voltage tunable Fabry-Perot interferometer structure with a silicon p-n photodiode in order to obtain a tunable optical sensor. The Fabry-Perot interferometer can be used as a voltage tunable filter for the input radiation or as a voltage controlled attenuator to regulate the light from a monochromatic source. In our approach, the top mirror of the Fabry-Perot cavity is an Au/SiO 2 movable membrane, formed by anisotropic etching of (1 1 1)-oriented Si wafers. The Au layer provides a good reflectivity of the upper mirror. The air-silicon surface acts as the lower mirror, as the anisotropic etching of (1 1 1)-oriented Si wafers provides very smooth surfaces. The upper movable mirror can be electrostatically actuated. This Fabry-Perot interferometer was realized on the top of a p-n photodiode.

Who reads Design and Experiments for Tunable Optical Sensor Fabrication Using (1 1 1)-Oriented Silicon Micromachining?

Author

Dana Cristea; M. Kusko; C. Tibeica; Raluca Muller; Elena Manea; D. Syvridis

Publisher

Elsevier Science; Elsevier ; Elsevier BV (ISSN 0924-4247)

Published

2004

Language

EN

Field

Engineering (Physical Sciences)