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Applicability of multiple angle of incidence ellipsometry (MAI). Measurements to GaAs anodic oxide and GaP anodic oxide systems at the wavelength 632.8 nm by Dr. K. Löschke; Dipl.-Math. J. Baumgarten is a Materials Science article available to read on EtoBox.

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## Applicability of Multiple Angle of Incidence Ellipsometry (MAI). Measurements to GaAs Anodic Oxide and GaP Anodic Oxide Systems at the Wavelength 632.8 nm Usefulness of MA1 in practical studies of unknown optical systems is controversial in literature. I n the present paper i t is shown that the simple cross correlation test by IBRA-HIM and BASHARA with a modified correlation criterion provides a sure information on the feasibility of MA1 calculations. Its application to GaAs and GaP anodic oxide systems shows that in the thickness range 0 to 2500 A two distinct areas exist in the cases of t,he two materials in which the combination of the five parameters of the one-film system enables a successful and optimal use of MA1 calculations. However, all five parameters are not unreservedly calculable. Therefore, we propose a method of a stepwise variation of the fixed thickness in the range of the true value for solving the five parameter problem. An examination of the MA1 solutions with experimental data is given. Aus der Literatur geht hervor, dal3 die Anwendbarkeit der Vielwinkelellipsometrie (MAI) umstritten ist. I n der vorliegenden Arbeit wird gezeigt, dal3 die einfache Methode

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Author

Dr. K. Löschke; Dipl.-Math. J. Baumgarten

Publisher

John Wiley and Sons; Wiley (John Wiley & Sons); Wiley - V C H Verlag GmbbH & Co.; Wiley (ISSN 0232-1300)

Published

1978

Language

EN

Field

Materials Science (Physical Sciences)