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Injection MOCVD: ferroelectric thin films and functional oxide superlattices by F Weiss; J Lindner; J.P Senateur; C Dubourdieu; V Galindo; M Audier; A Abrutis; M Rosina; K Fröhlich; W Haessler; S Oswald; A Figueras; J Santiso is a Engineering article available to read on EtoBox.
What is Injection MOCVD: ferroelectric thin films and functional oxide superlattices about?
MOCVD is a suitable technique for the synthesis of functional metal oxide thin films. In the present paper, injection-MOCVD was proved to be an efficient method, not only to grow single layers, but also heterostructures and superlattices of functional Ž . wŽ .x oxide materials. We report on the deposition of Ba Sr TiO BST films and BaTiO rSrTiO superlattices BTOrSTO x 1yx 3 3 3 n Ž .Ž . obtained by injection MOCVD. In a first step, BST films were deposited on various substrates such as LaAlO LAO 012 , 3 Ž . Ž . Ž . SrTiO :Nb STO:Nb 001 and Al O 0001 , resulting in epitaxial films in the case of STO or LAO substrates and highly textured 3 2 3 films in the case of Al O substrates. The good crystallinity of the films obtained was evidenced using X-ray analysis. Concerning 2 3 the dielectric properties of BST films on STO:Nb, the T values were found to be the same as those for bulk materials. In a next c Ž . step the feasibility of BTOrSTO superlattices was studied. The multilayers obtained were epitaxially grown on LAO and n STO:Nb substrates. XPS was used to check in detail the pattern repetition of the superlattice and proved the low interface roughness of 1 nm as well as the absenc
Who reads Injection MOCVD: ferroelectric thin films and functional oxide superlattices?
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- F Weiss; J Lindner; J.P Senateur; C Dubourdieu; V Galindo; M Audier; A Abrutis; M Rosina; K Fröhlich; W Haessler; S Oswald; A Figueras; J Santiso
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0257-8972)
- Published
- 2000
- Language
- EN
- Field
- Engineering (Physical Sciences)