About this scholarly article

Proceedings of the 6th International Symposium on Power Semiconductor Devices and Ics - Influence of the mechanical conditions on the electrical and structural properties of the interface between directly bonded silicon wafers by Laporte, A.; Sarrabayrouse, G.; Lescouzeres, L.; PeyreLavigne, A.; Benamara, M.; Rocher, A.; Claverie, A. is a scholarly article available to read on EtoBox.

Author

Laporte, A.; Sarrabayrouse, G.; Lescouzeres, L.; PeyreLavigne, A.; Benamara, M.; Rocher, A.; Claverie, A.

Publisher

Hartung-Gorre Verlag

Published

1994