About this scholarly article

Conference on Lasers and Electro-Optics - Optimization of Titanium Nitride Films using Plasma Enhanced Atomic Layer Deposition by Secondo, Ray; Avrutin, Vitaliy; Özgür, Ümit; Kinsey, Nathaniel is a scholarly article available to read on EtoBox.

Author

Secondo, Ray; Avrutin, Vitaliy; Özgür, Ümit; Kinsey, Nathaniel

Publisher

OSA

Published

2018