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About this Engineering article
Pressure dependence of Ar+2, ArTi+, and Ti+2 dimer formation in a magnetron sputtering discharge. by Hippler, Rainer; Cada, Martin; Stranak, Vitezslav; Hubicka, Zdenek; Helm, Christine A is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Hippler, Rainer; Cada, Martin; Stranak, Vitezslav; Hubicka, Zdenek; Helm, Christine A
- Publisher
- Institute of Physics; IOP Publishing; Institute of Physics Publishing (ISSN 0022-3727)
- Published
- 2017
- Language
- EN
- Field
- Engineering (Physical Sciences)