About this scholarly article

2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Novel method for the assembly and electrical contacting of out-of-plane microstructures by Kisban, Sebastian; Holzhammer, Tobias; Herwik, Stanislav; Paul, Oliver; Ruther, Patrick is a scholarly article available to read on EtoBox.

Author

Kisban, Sebastian; Holzhammer, Tobias; Herwik, Stanislav; Paul, Oliver; Ruther, Patrick

Publisher

IEEE

Published

2010

Language

EN