About this scholarly article

SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California, United States (Sunday 25 August 2013)] Advances in X-Ray/EUV Optics and Components VIII - Fabrication of x-ray gratings by direct write maskless lithography by Voronov, D. L.; Diez, S.; Lum, P.; Hidalgo, S. A.; Warwick, T.; Artemiev, N.; Padmore, H. A.; Khounsary, Ali; Goto, Shunji; Morawe, Christian is a scholarly article available to read on EtoBox.

Author

Voronov, D. L.; Diez, S.; Lum, P.; Hidalgo, S. A.; Warwick, T.; Artemiev, N.; Padmore, H. A.; Khounsary, Ali; Goto, Shunji; Morawe, Christian

Publisher

SPIE

Published

2013

Language

EN