About this scholarly article

Proceedings of 1994 American Control Conference - ACC '94 - Nonlinear system identification and control of a reactive ion etcher by Vincent, T.L.; Khargonekar, P.P.; Rashap, B.A.; Terry, E.; Elta, M. is a scholarly article available to read on EtoBox.

Author

Vincent, T.L.; Khargonekar, P.P.; Rashap, B.A.; Terry, E.; Elta, M.

Publisher

IEEE

Published

1994

Language

EN