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About this Physics and Astronomy article
Initial conditions for preparation of thin AlN films by atomic layer deposition by Beshkova, M; Blagoev, B S; Mehandzhiev, V; Yakimova, R; Georgieva, B; Avramova, I; Terziyska, P; Kovacheva, D; Strijkova, V is a Physics and Astronomy article available to read on EtoBox.
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- Author
- Beshkova, M; Blagoev, B S; Mehandzhiev, V; Yakimova, R; Georgieva, B; Avramova, I; Terziyska, P; Kovacheva, D; Strijkova, V
- Publisher
- Institute of Physics; IOP Publishing (ISSN 1742-6588)
- Published
- 2020
- Field
- Physics and Astronomy (Physical Sciences)