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About this Engineering article
Effect of Hydrogen Flow on the Properties of Hydrogenated Amorphous Carbon Films Fabricated by Electron Cyclotron Resonance Plasma Enhanced Chemical Vapor Deposition by X.R. Deng; Y.X. Leng; X. Dong; H. Sun; Nan Huang is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- X.R. Deng; Y.X. Leng; X. Dong; H. Sun; Nan Huang
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0257-8972)
- Published
- 2011
- Language
- EN
- Field
- Engineering (Physical Sciences)
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