Can I read InNx Film Crystallinity via Sputtering on EtoBox?
InNx Film Crystallinity via Sputtering by Lex Chan is a document available to read on EtoBox.
What is InNx Film Crystallinity via Sputtering about?
InNx films were deposited on soda-lime glass using reactive dc magnetron sputtering, revealing improved crystallinity and stoichiometry at lower total gas pressures and higher nitrogen flow ratios. The study indicates that the crystallinity is enhanced by increased activated nitrogen radicals and the kinetic energy of sputtered indium atoms. X-ray diffraction patterns confirmed the preferred orientation of the polycrystalline InNx films, with the best results observed at a nitrogen flow ratio exceeding 50%
- Author
- Lex Chan
- Language
- EN