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About this Engineering article
AlSixOyas a High-Transmittance Embedded Material of Ternary Attenuated Phase-Shifting Mask and Correlation between Chemical Composition and Optical Properties of AlSixOyin 193 nm Lithography by C. Lin; W. Loong is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- C. Lin; W. Loong
- Publisher
- Institute of Pure and Applied Physics; Japan Society of Applied Physics; IOP Publishing (ISSN 0021-4922)
- Published
- 2000
- Language
- EN
- Field
- Engineering (Physical Sciences)