About this scholarly article

Proceedings of 11th International Conference on Ion Implantation Technology - Cooled electrostatic chuck for high current serial ion implantation by Walther, S.R.; Ballou, J.; White, N.R. is a scholarly article available to read on EtoBox.

Author

Walther, S.R.; Ballou, J.; White, N.R.

Publisher

IEEE

Published

1997