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About this Engineering article
CMP of hard disk substrate using a colloidal SiO2 slurry: preliminary experimental investigation by Hong Lei; Jianbin Luo is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Hong Lei; Jianbin Luo
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0043-1648)
- Published
- 2004
- Language
- EN
- Field
- Engineering (Physical Sciences)