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Micro-Opto-Electro-Mechanical Systems by Rohith Tito is a document available to read on EtoBox.
What is Micro-Opto-Electro-Mechanical Systems about?
MOEMS (Micro Opto Electro Mechanical Systems) combines optics and micro-mechanics, fabricated using techniques from microelectronics. It integrates mechanical elements, sensors, actuators and electronics on a common silicon substrate through microfabrication. This allows miniaturized systems to be batch fabricated for reduced cost and improved reliability. A MOEMS device combines the computational ability of integrated circuits with the sensing ability of mechanical devices, allowing microsystems to sense a
- Author
- Rohith Tito
- Language
- EN