Opening book details…
About this Engineering article
Modeling and Control of Wet Etching by Zhou, B.; Ramirez, W.F. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Zhou, B.; Ramirez, W.F.
- Publisher
- Elsevier - International Federation of Automatic Control (IFAC); Elsevier BV (ISSN 1474-6670)
- Published
- 1996
- Language
- EN
- Field
- Engineering (Physical Sciences)