Skip to content

Opening book details…

About this Engineering article

Fourier transform infrared spectroscopy of CF4plasmas in the GEC reference cell by Cruden, Brett A; Rao, M V V S; Sharma, Surendra P; Meyyappan, M is a Engineering article available to read on EtoBox.

It is typically read by researchers, students, and practitioners in Engineering.

Author
Cruden, Brett A; Rao, M V V S; Sharma, Surendra P; Meyyappan, M
Publisher
Institute of Physics; IOP Publishing; Institute of Physics Publishing (ISSN 0963-0252)
Published
2002
Field
Engineering (Physical Sciences)

More by Cruden, Brett A; Rao, M V V S; Sharma, Surendra P; Meyyappan, M

Browse all works by Cruden, Brett A; Rao, M V V S; Sharma, Surendra P; Meyyappan, M