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A Tabu search approach to scheduling an automated wet etch station by Christopher D. Geiger; Karl G. Kempf; Reha Uzsoy is a Engineering article available to read on EtoBox.

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This paper addresses a production scheduling problem arising at the wet etching process in a semiconductor wafer fabrication facility. Material handling capacity, material processing constraints, and mixed storage policies are considered in formulating the problem as a flow shop sequencing problem with the objective of minimizing makespan (Cmax). Efficient heuristics and a tabu search procedure are developed to generate high-quality solutions in reasonable computational time. Extensive computational experiments evaluating the performance of the heuristics are reported.

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Author

Christopher D. Geiger; Karl G. Kempf; Reha Uzsoy

Publisher

Society of Manufacturing Engineers; Elsevier ; Elsevier BV (ISSN 0278-6125)

Published

1997

Language

EN

Field

Engineering (Physical Sciences)