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About this Engineering article
Effects of Deposition Pressure on the Properties of a Low-Dielectric Constant Cyclohexane-based Plasma Polymer by Y. C. Quan; J. Joo; S. Yeo; D. Jung is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Y. C. Quan; J. Joo; S. Yeo; D. Jung
- Publisher
- Institute of Pure and Applied Physics; Japan Society of Applied Physics; IOP Publishing (ISSN 0021-4922)
- Published
- 2000
- Language
- EN
- Field
- Engineering (Physical Sciences)