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About this Engineering article
Influence of Thickness and Growth Temperature on the Properties of Zirconium Oxide Films Grown by Atomic Layer Deposition on Silicon by Kaupo Kukli; Mikko Ritala; Teet Uustare; Jaan Aarik; Katarina Forsgren; Timo Sajavaara; Markku Leskelä; Anders Hårsta is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Kaupo Kukli; Mikko Ritala; Teet Uustare; Jaan Aarik; Katarina Forsgren; Timo Sajavaara; Markku Leskelä; Anders Hårsta
- Publisher
- Elsevier Science; Elsevier ; Elsevier Sequoia; Elsevier BV (ISSN 0040-6090)
- Published
- 2002
- Language
- EN
- Field
- Engineering (Physical Sciences)