About this scholarly article

SPIE Proceedings [SPIE Optical Engineering + Applications - San Diego, CA (Sunday 10 August 2008)] Advances in Thin-Film Coatings for Optical Applications V - Deposition and characterization of challenging DUV coatings by Kelkar, Parag; Tirri, Bruce; Wilklow, Ron; Peterson, David; Kruschwitz, Jennifer D. T.; Ellison, Michael J. is a scholarly article available to read on EtoBox.

Author

Kelkar, Parag; Tirri, Bruce; Wilklow, Ron; Peterson, David; Kruschwitz, Jennifer D. T.; Ellison, Michael J.

Publisher

SPIE

Published

2008

Language

EN