Opening book details…
About this Engineering article
Capability of 70 nm Pattern Replication in X-Ray Lithography by Y. Kikuchi; Y. Matsui is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Y. Kikuchi; Y. Matsui
- Publisher
- Institute of Pure and Applied Physics; Japan Society of Applied Physics; IOP Publishing (ISSN 0021-4922)
- Published
- 2001
- Language
- EN
- Field
- Engineering (Physical Sciences)