About this Engineering article
The Vertical Traverse Stage in Vacuum Condition. by OHTSUKA, Masaru; FURUKAWA, Motomu; HIGOMURA, Makoto is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- OHTSUKA, Masaru; FURUKAWA, Motomu; HIGOMURA, Makoto
- Publisher
- The Japan Society of Mechanical Engineers; Japan Society of Mechanical Engineers/Nihon Kikai Gakkai; Japan Society of Mechanical Engineers (ISSN 0914-8825)
- Published
- 1990
- Field
- Engineering (Physical Sciences)