About this Engineering article
Three-dimensional Microfabrication in Bulk Silicon Using High-energy Protons by Teo, E. J.; Breese, M. B. H.; Tavernier, E. P.; Bettiol, A. A.; Watt, F.; Liu, M. H.; Blackwood, D. J. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Teo, E. J.; Breese, M. B. H.; Tavernier, E. P.; Bettiol, A. A.; Watt, F.; Liu, M. H.; Blackwood, D. J.
- Publisher
- American Institute of Physics; AIP Publishing (ISSN 0003-6951)
- Published
- 2004
- Language
- EN
- Field
- Engineering (Physical Sciences)