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About this Engineering article
Optical Detection System of Defects in Multi Layered Optical Device by Minami, Kohji; Kurimoto, Eiji; Hirano, Kenji; Miyake, Tomoyuki; Nakata, Yasuo; Kurata, Yukio is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Minami, Kohji; Kurimoto, Eiji; Hirano, Kenji; Miyake, Tomoyuki; Nakata, Yasuo; Kurata, Yukio
- Publisher
- Institute of Pure and Applied Physics; Japan Society of Applied Physics; IOP Publishing (ISSN 0021-4922)
- Published
- 2008
- Language
- EN
- Field
- Engineering (Physical Sciences)