About this scholarly article

2000 IEEE Ultrasonics Symposium. Proceedings. An International Symposium (Cat. No.00CH37121) - DLC films for SAW devices and novel self-aligning fabrication process by Zhgoon, S.A.; Revkov, A.M.; Barinov, A.E.; Zhang, Q.; Yoon, S.F.; Ahn, J.; Rusli, is a scholarly article available to read on EtoBox.

Author

Zhgoon, S.A.; Revkov, A.M.; Barinov, A.E.; Zhang, Q.; Yoon, S.F.; Ahn, J.; Rusli,

Publisher

IEEE

Published

2000

Language

EN