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About this Engineering article
A Freestanding GaN/HfO $_{\bf 2}$ Membrane Grown by Molecular Beam Epitaxy for GaN–Si Hybrid MEMS by Sameshima, H.; Wakui, M.; Fang-Ren Hu; Hane, K. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Sameshima, H.; Wakui, M.; Fang-Ren Hu; Hane, K.
- Publisher
- IEEE; Institute of Electrical and Electronics Engineers; Institute of Electrical and Electronics Engineers (IEEE) (ISSN 1077-260X)
- Published
- 2009
- Field
- Engineering (Physical Sciences)
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